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1000T/Y Nitrogen Trifluoride Project (Special Gas Purity 99.996%)
年产1000吨三氟化氮项⽬(特⽓⾏业纯度99.996%) 三氟化氮(Nitrogen Trifluoride),化学式NF3,是⼀种强氧化剂。作为⼀种重要的⼯业特种⽓体,具有⼔泛的天家在微电⼦⼯业中,三氟化氮是⼀种优良的等离⼦蚀刻⽓体,在半导体芯⽚、平来显⽰器、光纤、光伏电池等制造领域,三氟化氮主要⽤作等离⼦蚀刻⽓体...
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